发明申请
- 专利标题: Drawing Method and Apparatus
- 专利标题(中): 绘图方法和装置
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申请号: US11989532申请日: 2006-07-28
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公开(公告)号: US20080220344A1公开(公告)日: 2008-09-11
- 发明人: Daisuke Nakaya , Toru Katayama , Takashi Fukui , Manabu Mizumoto , Susumu Tomiyama
- 申请人: Daisuke Nakaya , Toru Katayama , Takashi Fukui , Manabu Mizumoto , Susumu Tomiyama
- 优先权: JP2005-220604 20050729
- 国际申请: PCT/JP2006/315023 WO 20060728
- 主分类号: G03F9/00
- IPC分类号: G03F9/00 ; G03F7/20 ; G02B7/182
摘要:
In a drawing method for drawing an image on a substrate by relatively moving a drawing head that forms, based on input drawing-point data, drawing points on the substrate with respect to the substrate and by sequentially forming the drawing points on the substrate by the drawing head based on the movement of the drawing head, a relative positional deviation between the substrate and the drawing head during drawing of the image is obtained. Further, formation positions of the drawing points by the drawing head are corrected based on the obtained relative positional deviation.
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