发明申请
- 专利标题： IMPRINT DEVICE AND METHOD OF MANUFACTURING IMPRINTED STRUCTURE
- 专利标题（中）： 印刷装置及制造印花结构的方法
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申请号： US12019839申请日： 2008-01-25
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公开(公告)号： US20080229948A1公开(公告)日： 2008-09-25
- 发明人: Ryuta Washiya , Takashi Ando , Masahiko Ogino , Hideaki Kataho , Akihiro Miyauchi , Kosuke Kuwabara
- 申请人： Ryuta Washiya , Takashi Ando , Masahiko Ogino , Hideaki Kataho , Akihiro Miyauchi , Kosuke Kuwabara
- 优先权： JP2007-072259 20070320
- 主分类号： B41F1/40
- IPC分类号： B41F1/40
摘要：
An imprint device transfers a micropattern created on a stamper onto a material to be transferred, by bringing the stamper and the material to be transferred into contact with each other. The imprint device has a flow passage for discharging a fluid to a rear surface of the stamper or the material to be transferred, to thereby bend the stamper or the material to be transferred.
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