发明申请
US20080232745A1 HIGH-TEMPERATURE PRESSURE SENSOR AND METHOD OF ASSEMBLY 有权
高温压力传感器及其组装方法

HIGH-TEMPERATURE PRESSURE SENSOR AND METHOD OF ASSEMBLY
摘要:
A method for assembling a Fabry-Perot interferometer includes depositing a first metal layer on an end portion of a ferrule, depositing a second metal layer on a back portion of a die, placing the first metal layer and the second metal layer in contact with each other with respective first and second orifices aligned with respect to each other, and bonding the ferrule to the die by thermo compression. The resulting interferometer includes a glass die with a cavity, a silicon diaphragm disposed over the opening of the cavity and bonded to the glass die, a ferrule bonded to the glass die by thermo compression with the first and second orifices being aligned to each other, and an optical fiber inserted through the other end of the ferrule in direct contact to a back portion of the die and aligned with the first orifice.
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