发明申请
- 专利标题: HIGH-TEMPERATURE PRESSURE SENSOR AND METHOD OF ASSEMBLY
- 专利标题(中): 高温压力传感器及其组装方法
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申请号: US11687931申请日: 2007-03-19
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公开(公告)号: US20080232745A1公开(公告)日: 2008-09-25
- 发明人: Aaron Jay Knobloch , David Mulford Shaddock , David Richard Esler , Marco Francesco Aimi , Douglas S. Byrd , David Robert O'Connor , Stacey Joy Kennerly
- 申请人: Aaron Jay Knobloch , David Mulford Shaddock , David Richard Esler , Marco Francesco Aimi , Douglas S. Byrd , David Robert O'Connor , Stacey Joy Kennerly
- 主分类号: G02B6/36
- IPC分类号: G02B6/36 ; B29C65/02 ; B29C65/08
摘要:
A method for assembling a Fabry-Perot interferometer includes depositing a first metal layer on an end portion of a ferrule, depositing a second metal layer on a back portion of a die, placing the first metal layer and the second metal layer in contact with each other with respective first and second orifices aligned with respect to each other, and bonding the ferrule to the die by thermo compression. The resulting interferometer includes a glass die with a cavity, a silicon diaphragm disposed over the opening of the cavity and bonded to the glass die, a ferrule bonded to the glass die by thermo compression with the first and second orifices being aligned to each other, and an optical fiber inserted through the other end of the ferrule in direct contact to a back portion of the die and aligned with the first orifice.
公开/授权文献
- US07559701B2 High-temperature pressure sensor and method of assembly 公开/授权日:2009-07-14
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