发明申请
US20080240193A1 Two-dimensional photonic crystal surface-emitting laser 有权
二维光子晶体表面发射激光器

Two-dimensional photonic crystal surface-emitting laser
摘要:
The two-dimensional photonic crystal surface emitting laser according to the present invention includes a semiconductor substrate, a main laser section and a reflection film. The main laser section includes a lower cladding layer, an active layer, a two-dimensional photonic crystal layer, an upper cladding layer and a contact layer, which are all deposited on the semiconductor substrate. The reflection film, which surrounds the entire side surfaces of the main laser section, is made of a thin titanium-gold film deposited by sputtering.
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