发明申请
US20080242057A1 SEMICONDUCTOR DEVICE WITH A THINNED SEMICONDUCTOR CHIP AND METHOD FOR PRODUCING THE THINNED SEMICONDUCTOR CHIP
有权
具有薄膜半导体芯片的半导体器件和用于生产薄膜半导体芯片的方法
- 专利标题: SEMICONDUCTOR DEVICE WITH A THINNED SEMICONDUCTOR CHIP AND METHOD FOR PRODUCING THE THINNED SEMICONDUCTOR CHIP
- 专利标题(中): 具有薄膜半导体芯片的半导体器件和用于生产薄膜半导体芯片的方法
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申请号: US11866853申请日: 2007-10-03
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公开(公告)号: US20080242057A1公开(公告)日: 2008-10-02
- 发明人: Michael Bauer , Ludwig Heitzer , Jens Pohl , Peter Strobel , Christian Stuempfl
- 申请人: Michael Bauer , Ludwig Heitzer , Jens Pohl , Peter Strobel , Christian Stuempfl
- 申请人地址: DE Neubiberg
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Neubiberg
- 优先权: DE102005039479.5 20050818
- 主分类号: H01L21/304
- IPC分类号: H01L21/304
摘要:
A semiconductor device with a thinned semiconductor chip and a method for producing the latter is disclosed. In one embodiment, the thinned semiconductor chip has a top side with contact areas and a rear side with a rear side electrode. In this case, the rear side electrode is cohesively connected to a chip pad of a circuit carrier via an electrically conductive layer. In another embodiment, the thinned semiconductor chips of this semiconductor device according to the invention have low-microdefect edge side regions with semiconductor element structures and edge sides patterned by etching technology.
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