发明申请
US20080244896A1 ADDITIVE GAP PROCESS TO DEFINE TRAILING AND SIDE SHIELD GAP FOR A PERPENDICULAR WRITE HEAD 有权
添加剂GAP工艺来确定一个完整的写入头部的跟踪和边界屏蔽

ADDITIVE GAP PROCESS TO DEFINE TRAILING AND SIDE SHIELD GAP FOR A PERPENDICULAR WRITE HEAD
摘要:
A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method includes the formation of a write pole over a substrate. A non-magnetic side gap layer is deposited and an ion milling is used to remove a portion of the substrate to lower the floor of the substrate. A sacrificial fill layer can then be deposited. A chemical mechanical polishing process can be used to remove the mask structure remaining as a remnant of the formation of the write pole, and then the sacrificial fill layer can be removed. A non-magnetic, electrically conductive material can be deposited to form a trailing gap, and a magnetic material can then be deposited to form a wrap around trailing shield.
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