发明申请
US20080244896A1 ADDITIVE GAP PROCESS TO DEFINE TRAILING AND SIDE SHIELD GAP FOR A PERPENDICULAR WRITE HEAD
有权
添加剂GAP工艺来确定一个完整的写入头部的跟踪和边界屏蔽
- 专利标题: ADDITIVE GAP PROCESS TO DEFINE TRAILING AND SIDE SHIELD GAP FOR A PERPENDICULAR WRITE HEAD
- 专利标题(中): 添加剂GAP工艺来确定一个完整的写入头部的跟踪和边界屏蔽
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申请号: US11688310申请日: 2007-03-20
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公开(公告)号: US20080244896A1公开(公告)日: 2008-10-09
- 发明人: Christian Rene Bonhote , Quang Le , Neil Leslie Robertson , Petrus Antonius Van Der Heijden
- 申请人: Christian Rene Bonhote , Quang Le , Neil Leslie Robertson , Petrus Antonius Van Der Heijden
- 专利权人: HITACHI GLOBAL STORAGE TECHNOLOGIES
- 当前专利权人: HITACHI GLOBAL STORAGE TECHNOLOGIES
- 主分类号: B05D5/12
- IPC分类号: B05D5/12 ; G11B5/127
摘要:
A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method includes the formation of a write pole over a substrate. A non-magnetic side gap layer is deposited and an ion milling is used to remove a portion of the substrate to lower the floor of the substrate. A sacrificial fill layer can then be deposited. A chemical mechanical polishing process can be used to remove the mask structure remaining as a remnant of the formation of the write pole, and then the sacrificial fill layer can be removed. A non-magnetic, electrically conductive material can be deposited to form a trailing gap, and a magnetic material can then be deposited to form a wrap around trailing shield.
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