发明申请
- 专利标题: Process for Preparing a Dispersion Liquid of Zeolite Fine Particles
- 专利标题(中): 沸石微粒分散液的制备方法
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申请号: US12060291申请日: 2008-04-01
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公开(公告)号: US20080248280A1公开(公告)日: 2008-10-09
- 发明人: Yoshitaka Hamada , Masaru Sasago , Hideo Nakagawa , Yasunori Morinaga
- 申请人: Yoshitaka Hamada , Masaru Sasago , Hideo Nakagawa , Yasunori Morinaga
- 专利权人: Shin-Etsu Chemical Co., Ltd.,Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.,Matsushita Electric Industrial Co., Ltd.
- 优先权: JP2007-097494 20070403
- 主分类号: B32B3/26
- IPC分类号: B32B3/26 ; C09K17/40 ; H01L21/3105 ; B05D3/02
摘要:
The invention provides a preparation process of organic-group-modified zeolite fine particles excellent in stability of particle size and to be used for electronic materials or the like. The preparation process comprises a first step of obtaining a liquid containing zeolite seed crystals having a particle size of 80 nm or less which are formed in the presence of a structure directing agent, a second step of adding an organic-group-containing hydrolyzable silane compound to the liquid obtained by the first step, and a third step of maturing the liquid of the second step at temperature higher than that of the first step. A dispersion liquid of zeolite fine particles obtained by the process.
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