发明申请
- 专利标题: Block Contact Architectures for Nanoscale Channel Transistors
- 专利标题(中): 用于纳米级晶体管的块式触点架构
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申请号: US11855823申请日: 2007-09-14
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公开(公告)号: US20080258207A1公开(公告)日: 2008-10-23
- 发明人: Marko Radosavljevic , Amlan Majumdar , Brian S. Doyle , Jack Kavalieros , Mark L. Doczy , Justin K. Brask , Uday Shah , Suman Datta , Robert S. Chau
- 申请人: Marko Radosavljevic , Amlan Majumdar , Brian S. Doyle , Jack Kavalieros , Mark L. Doczy , Justin K. Brask , Uday Shah , Suman Datta , Robert S. Chau
- 主分类号: H01L29/786
- IPC分类号: H01L29/786
摘要:
A contact architecture for nanoscale channel devices having contact structures coupling to and extending between source or drain regions of a device having a plurality of parallel semiconductor bodies. The contact structures being able to contact parallel semiconductor bodies having sub-lithographic pitch.
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