发明申请
US20080258221A1 SUBSTRATE SOLUTION FOR BACK GATE CONTROLLED SRAM WITH COEXISTING LOGIC DEVICES
有权
用于具有共同逻辑设备的后盖控制SRAM的基板解决方案
- 专利标题: SUBSTRATE SOLUTION FOR BACK GATE CONTROLLED SRAM WITH COEXISTING LOGIC DEVICES
- 专利标题(中): 用于具有共同逻辑设备的后盖控制SRAM的基板解决方案
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申请号: US12144272申请日: 2008-06-23
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公开(公告)号: US20080258221A1公开(公告)日: 2008-10-23
- 发明人: Robert H. Dennard , Wilfried E. Haensch , Arvind Kumar , Robert J. Miller
- 申请人: Robert H. Dennard , Wilfried E. Haensch , Arvind Kumar , Robert J. Miller
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/11
- IPC分类号: H01L27/11
摘要:
A semiconductor structure that includes at least one logic device region and at least one static random access memory (SRAM) device region wherein each device region includes a double gated field effect transistor (FET) wherein the back gate of each of the FET devices is doped to a specific level so as to improve the performance of the FET devices within the different device regions is provided. In particular, the back gate within the SRAM device region is more heavily doped than the back gate within the logic device region. In order to control short channel effects, the FET device within the logic device region includes a doped channel, while the FET device within the SRAM device region does not. A none uniform lateral doping profile with a low net doping beneath the source/drain regions and a high net doping underneath the channel would provide additional SCE control for the logic device.
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