发明申请
US20080258857A1 ELECTRONIC FUSE WITH CONFORMAL FUSE ELEMENT FORMED OVER A FREESTANDING DIELECTRIC SPACER
失效
具有合适的保险丝元件的电子保险丝在自动电介质间隔件上形成
- 专利标题: ELECTRONIC FUSE WITH CONFORMAL FUSE ELEMENT FORMED OVER A FREESTANDING DIELECTRIC SPACER
- 专利标题(中): 具有合适的保险丝元件的电子保险丝在自动电介质间隔件上形成
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申请号: US12128100申请日: 2008-05-28
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公开(公告)号: US20080258857A1公开(公告)日: 2008-10-23
- 发明人: Louis Lu-Chen Hsu , Jack A. Mandelman , William R. Tonti , Chih-Chao Yang
- 申请人: Louis Lu-Chen Hsu , Jack A. Mandelman , William R. Tonti , Chih-Chao Yang
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01H85/08
- IPC分类号: H01H85/08
摘要:
An electronic fuse for an integrated circuit and a method of fabrication thereof are presented. The electronic fuse has a first terminal portion and a second terminal portion interconnected by a fuse element. The fuse element has a convex upper surface and a lower surface with a radius of curvature at a smallest surface area of curvature less than or equal to 100 nanometers. Fabricating the electronic fuse includes forming an at least partially freestanding dielectric spacer above a supporting structure, and then conformably forming the fuse element of the fuse over at least a portion of the freestanding dielectric spacer, with the fuse element characterized as noted above. The dielectric spacer may remain in place as a thermally insulating layer underneath the fuse element, or may be removed to form a void underneath the fuse element.