发明申请
US20080259461A1 METHODS AND APPARATUS FOR PROCESSING A LARGE AREA PULSED LASER BEAM TO CREATE APERTURES THROUGH MICROLENS ARRAYS
失效
用于处理大面积脉冲激光束以通过微阵列产生孔径的方法和装置
- 专利标题： METHODS AND APPARATUS FOR PROCESSING A LARGE AREA PULSED LASER BEAM TO CREATE APERTURES THROUGH MICROLENS ARRAYS
- 专利标题（中）： 用于处理大面积脉冲激光束以通过微阵列产生孔径的方法和装置
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申请号： US12120834申请日： 2008-05-15
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公开(公告)号： US20080259461A1公开(公告)日： 2008-10-23
- 发明人: Richard N. Gardner , Thomas A. Rinehart , Robert L. Wood
- 申请人： Richard N. Gardner , Thomas A. Rinehart , Robert L. Wood
- 专利权人： Bright View Technologies, Inc.
- 当前专利权人： Bright View Technologies, Inc.
- 主分类号： G02B27/10
- IPC分类号： G02B27/10
摘要：
A pulsed laser beam is used to create apertures in a layer on a back side of a substrate that includes a microlens array on a front side thereof. The pulsed laser beam is focused in a vacuum spatial filter. A profile of the pulsed laser beam that emerges from the vacuum spatial filter is converted to a top hat profile. The laser beam having the top hat profile is diffused. Finally, the pulsed laser beam having the top half profile that has been diffused is impinged through the microlens array on the front side of the substrate and onto the layer on the back side of the substrate. Related apparatus for creating the apertures and microlens array products are also described.