发明申请
US20080261345A1 METHOD FOR MANUFACTURING A SEMICONDUCTOR PRESSURE SENSOR 有权
制造半导体压力传感器的方法

METHOD FOR MANUFACTURING A SEMICONDUCTOR PRESSURE SENSOR
摘要:
Method for manufacturing a semiconductor pressure sensor, wherein, in a silicon substrate, trenches are dug and delimit walls; a closing layer is epitaxially grown, that closes the trenches at the top and forms a suspended membrane; a heat treatment is performed so as to cause migration of the silicon of the walls and to form a closed cavity underneath the suspended membrane; and structures are formed for transducing the deflection of the suspended membrane into electrical signals.
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