发明申请
US20080263028A1 Report Search Method, Report Search System, and Reviewing Apparatus 审中-公开
报告搜索方法,报告搜索系统和检查设备

Report Search Method, Report Search System, and Reviewing Apparatus
摘要:
An object of the present invention is to provide a report search method, and a reviewing apparatus by which a measure against abnormalities such as a defect of a sample may be quickly obtained by searching desired information in a report recording past information.In order to achieve the above object, the present invention has a configuration in which an image of a defective appearance and supplementary information on the image are memorized as a report file as one unit in a database for an observation result of the defective appearance of a sample in a manufacturing process, the supplementary information is searched as a search target among a plurality of report files memorized in the database by use of a search condition set from among the supplementary information, when a new defective appearance is generated, and the searched supplementary information and an image related with the supplementary information are output.
信息查询
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