发明申请
US20080263028A1 Report Search Method, Report Search System, and Reviewing Apparatus
审中-公开
报告搜索方法,报告搜索系统和检查设备
- 专利标题: Report Search Method, Report Search System, and Reviewing Apparatus
- 专利标题(中): 报告搜索方法,报告搜索系统和检查设备
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申请号: US11969007申请日: 2008-01-03
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公开(公告)号: US20080263028A1公开(公告)日: 2008-10-23
- 发明人: Takehiro Hirai , Kazuo Aoki , Naoma Ban
- 申请人: Takehiro Hirai , Kazuo Aoki , Naoma Ban
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-000020 20070104
- 主分类号: G06F7/06
- IPC分类号: G06F7/06 ; G06F17/30
摘要:
An object of the present invention is to provide a report search method, and a reviewing apparatus by which a measure against abnormalities such as a defect of a sample may be quickly obtained by searching desired information in a report recording past information.In order to achieve the above object, the present invention has a configuration in which an image of a defective appearance and supplementary information on the image are memorized as a report file as one unit in a database for an observation result of the defective appearance of a sample in a manufacturing process, the supplementary information is searched as a search target among a plurality of report files memorized in the database by use of a search condition set from among the supplementary information, when a new defective appearance is generated, and the searched supplementary information and an image related with the supplementary information are output.
信息查询