发明申请
- 专利标题: OPTICAL GAIN APPROACH FOR ENHANCEMENT OF OVERLAY AND ALIGNMENT SYSTEMS PERFORMANCE
- 专利标题(中): 增强覆盖和对准系统性能的光学增益方法
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申请号: US12108364申请日: 2008-04-23
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公开(公告)号: US20080266561A1公开(公告)日: 2008-10-30
- 发明人: Daniel Kandel , Vladimir Levinski , Michael Adel , Joel Seligson
- 申请人: Daniel Kandel , Vladimir Levinski , Michael Adel , Joel Seligson
- 申请人地址: US CA San Jose
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA San Jose
- 主分类号: G01B11/14
- IPC分类号: G01B11/14
摘要:
A resultant image of a grating target may be obtained by dividing an image of the target into first and second portions and optically modifying the first and/or second portion such that a final image formed from their combination is characterized by a Moiré pattern. The resultant image may be analyzed to determine a shift in the grating target from a shift in the Moiré pattern. Optical alignment apparatus may include a first beam splitter, an image transformation element optically coupled to the first beam splitter, and a second beam splitter. The first beam splitter divides an image of a grating target into first and second portions. The second beam splitter combines the first portion and the second portion. The image transformation element optically modifies the first and/or second portion such that a final image formed from their combination is characterized by a Moiré pattern.
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