发明申请
- 专利标题: Methods of Titanium Deposition
- 专利标题(中): 钛沉积方法
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申请号: US11741113申请日: 2007-04-27
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公开(公告)号: US20080268633A1公开(公告)日: 2008-10-30
- 发明人: Joel A. Drewes , Cem Basceri , Demetrius Sarigiannis
- 申请人: Joel A. Drewes , Cem Basceri , Demetrius Sarigiannis
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763
摘要:
Some embodiments include methods of titanium deposition in which a silicon-containing surface and an electrically insulative surface are both exposed to titanium-containing material, and in which such exposure forms titanium suicide from the silicon-containing surface while not depositing titanium onto the electrically insulative surface. The embodiments may include atomic layer deposition processes, and may include a hydrogen pre-treatment of the silicon-containing surfaces to activate the surfaces for reaction with the titanium-containing material. Some embodiments include methods of titanium deposition in which a semiconductor material surface and an electrically insulative surface are both exposed to titanium-containing material, and in which a titanium-containing film is uniformly deposited across both surfaces.
公开/授权文献
- US07700480B2 Methods of titanium deposition 公开/授权日:2010-04-20
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