发明申请
- 专利标题: PROBE ASSEMBLY
- 专利标题(中): 探测组件
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申请号: US12101798申请日: 2008-04-11
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公开(公告)号: US20080272796A1公开(公告)日: 2008-11-06
- 发明人: Nobuyuki Yamaguchi
- 申请人: Nobuyuki Yamaguchi
- 专利权人: Kabushiki Kaisha Nihon Micronics
- 当前专利权人: Kabushiki Kaisha Nihon Micronics
- 优先权: JP2007-121524 20070502
- 主分类号: G01R1/073
- IPC分类号: G01R1/073
摘要:
The probe assembly according to the present invention comprises a probe board and a plurality of probes. Each probe has an arm portion extending from the probe board at a distance and substantially along the probe board, a tip portion provided in the arm portion and projecting in a direction away from the probe board, and the tips provided in the tip portions are supported on the probe board at their base ends so as to be arranged in a matrix state on an imaginary XY plane along the X-axis and Y-axis. The respective probes are arranged so that the extending directions of said arms are arranged angularly relative to the X-axis and Y-axis and parallel to one another as seen on a plane P parallel to the imaginary plane.
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