发明申请
US20080273128A1 Programmable mask and method of fabricating biomolecule array using the same 失效
可编程掩模和使用其制造生物分子阵列的方法

Programmable mask and method of fabricating biomolecule array using the same
摘要:
The present invention relates to a programmable mask used in a photolithography process for fabricating a biomolecule array and a method of fabricating a biomolecule array using the same and, more particularly, to a programmable mask which can increase a contrast ratio of transmittance versus shielding of light incident to a liquid crystal which constitutes each pixel by irradiating parallel ultraviolet (“UV”) light generated from an external parallel light exposure device to a certain cell and using a vertically aligned liquid crystal panel or an LC panel having no spacer, and a method of fabricating a biomolecule array using the same.
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