发明申请
US20080274333A1 Composite structure and production method thereof 有权
复合结构及其制备方法

  • 专利标题: Composite structure and production method thereof
  • 专利标题(中): 复合结构及其制备方法
  • 申请号: US12150317
    申请日: 2008-04-25
  • 公开(公告)号: US20080274333A1
    公开(公告)日: 2008-11-06
  • 发明人: Junichi IwasawaHironori Hatono
  • 申请人: Junichi IwasawaHironori Hatono
  • 申请人地址: JP Kitakyushu-shi
  • 专利权人: Toto Ltd.
  • 当前专利权人: Toto Ltd.
  • 当前专利权人地址: JP Kitakyushu-shi
  • 优先权: JP2007-118739 20070427
  • 主分类号: C23C16/00
  • IPC分类号: C23C16/00 B32B5/00
Composite structure and production method thereof
摘要:
It is intended to provide a composite structure excellent in resistance characteristics such as plasma resistance. The composite structure includes a base material having a surface containing a ceramic polycrystal and a structure formed on the surface of the base material containing the ceramic polycrystal, wherein the structure contains a polycrystal containing a brittle material; a grain boundary layer having a glass layer does not substantially exist on a boundary face between crystals forming the polycrystal; a part of the polycrystal forms an anchor part embedded into the base material surface; and an average roughness (Ra) of an interface between the anchor part and the base material surface is 100 nm or less.
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