发明申请
- 专利标题: Composite structure and production method thereof
- 专利标题(中): 复合结构及其制备方法
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申请号: US12150317申请日: 2008-04-25
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公开(公告)号: US20080274333A1公开(公告)日: 2008-11-06
- 发明人: Junichi Iwasawa , Hironori Hatono
- 申请人: Junichi Iwasawa , Hironori Hatono
- 申请人地址: JP Kitakyushu-shi
- 专利权人: Toto Ltd.
- 当前专利权人: Toto Ltd.
- 当前专利权人地址: JP Kitakyushu-shi
- 优先权: JP2007-118739 20070427
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; B32B5/00
摘要:
It is intended to provide a composite structure excellent in resistance characteristics such as plasma resistance. The composite structure includes a base material having a surface containing a ceramic polycrystal and a structure formed on the surface of the base material containing the ceramic polycrystal, wherein the structure contains a polycrystal containing a brittle material; a grain boundary layer having a glass layer does not substantially exist on a boundary face between crystals forming the polycrystal; a part of the polycrystal forms an anchor part embedded into the base material surface; and an average roughness (Ra) of an interface between the anchor part and the base material surface is 100 nm or less.
公开/授权文献
- US08114473B2 Composite structure and production method thereof 公开/授权日:2012-02-14
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