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发明申请
US20080280112A1 Method fo Manufacturing a Microsystem, Such a Microsystem, a Stack of Foils Comprising Such a Microsystem, an Electronic Device Comprising Such a Microsystem and Use of the Electronic Device 审中-公开
制造微系统的方法，这样的微系统，包括这种微系统的一堆箔，包括这样的微系统的电子设备和电子设备的使用

Method fo Manufacturing a Microsystem, Such a Microsystem, a Stack of Foils Comprising Such a Microsystem, an Electronic Device Comprising Such a Microsystem and Use of the Electronic Device
摘要：
The invention relates to a method of manufacturing a microsystem and further to such microsystem. With the method a microsystem can be manufactured by stacking pre-processed foils (10) having a conductive layer (11a,11b) on at least one side. After stacking, the foils (10) are sealed, using pressure and heat. Finally the microsystems are separated from the stack (S). The pre-processing of the foils (preferably done by means of a laser beam) comprises a selection of the following steps: (A) leaving the foil intact, (B) locally removing the conductive layer, (C) removing the conductive layer and partially evaporating the foil (10), and (D) removing both the conductive layer as well as foil (10), thus making holes in the foil (10). In combination with said stacking, it is possible to create cavities, freely suspended cantilevers and membranes. This opens up the possibility of manufacturing various microsystems, like MEMS devices and microfluidic systems.
摘要（中）：

本发明涉及一种制造微系统并进一步涉及这种微系统的方法。 利用该方法，可以通过在至少一侧上堆叠具有导电层（11a，11b）的预处理箔（10）来制造微系统。 堆叠后，使用压力和热量将箔（10）密封。 最后，微系统与堆栈（S）分离。 箔的预处理（优选通过激光束进行）包括以下步骤的选择：（A）完全保留箔，（B）局部去除导电层，（C）去除导电层和 部分地蒸发箔（10），以及（D）去除导电层以及箔（10），从而在箔（10）中形成孔。 结合所述堆叠，可以产生空腔，自由悬挂的悬臂和膜。 这开辟了制造各种微系统的可能性，如MEMS器件和微流体系统。

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