发明申请
- 专利标题： Electronic Device Comprising a Mems Element
- 专利标题（中）： 包含Mems元素的电子设备
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申请号： US12093996申请日： 2006-11-07
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公开(公告)号： US20080283943A1公开(公告)日： 2008-11-20
- 发明人: Ronald Dekker , Hauke Polhmann , Martin Duemling
- 申请人： Ronald Dekker , Hauke Polhmann , Martin Duemling
- 申请人地址： NL EINDHOVEN
- 专利权人： KONINKLIJKE PHILIPS ELECTRONICS, N.V.
- 当前专利权人： KONINKLIJKE PHILIPS ELECTRONICS, N.V.
- 当前专利权人地址： NL EINDHOVEN
- 优先权： EP05077619.4 20051117
- 国际申请： PCT/IB2006/054142 WO 20061107
- 主分类号： H01L21/50
- IPC分类号： H01L21/50 ; H01L29/84
摘要：
The device (100) comprises a MEMS element (60) in a cavity (30) that is closed by a packaging portion (17) on a second side (2) of the substrate (10). Contact pads (25) are defined on a flexible resin layer (13) on an opposite first side (1) of the substrate. Electrical connections (32) extend through the resin layer (13) to at least one element of the device (100). The device (100) is suitably made with the use of a temporary carrier (42), and opening of etching holes (18) from the second side (2) of the substrate (10).
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