发明申请
- 专利标题: PROCESS FOR FORMING AN ISOLATED ELECTRICALLY CONDUCTIVE CONTACT THROUGH A METAL PACKAGE
- 专利标题(中): 通过金属包装形成隔离电导电接触的方法
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申请号: US11753996申请日: 2007-05-25
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公开(公告)号: US20080289178A1公开(公告)日: 2008-11-27
- 发明人: Michael Nashner , Jeff Howerton
- 申请人: Michael Nashner , Jeff Howerton
- 申请人地址: US OR Portland
- 专利权人: ELECTRO SCIENTIFIC INDUSTRIES, INC.
- 当前专利权人: ELECTRO SCIENTIFIC INDUSTRIES, INC.
- 当前专利权人地址: US OR Portland
- 主分类号: H05K5/02
- IPC分类号: H05K5/02 ; H01Q1/00
摘要:
A method of forming an isolated electrically conductive contact through a metal substrate by creating at least one via through the substrate. The at least one sidewall of the via is cleaned and coated with a non-conductive layer. In one example, the non-conductive layer is formed by anodizing the sidewall(s) of the via. In another example, the non-conductive layer may be formed by thin film deposition of a dielectric on the sidewall(s). An electrically conductive filler is then placed into the via. In the examples disclosed, the filler may be a conductive ink or a conductive epoxy.
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