发明申请
US20080293182A1 Method for Manufacturing Image Sensor 审中-公开
图像传感器制造方法

Method for Manufacturing Image Sensor
摘要:
Disclosed are methods of manufacturing an image sensor. The method can include forming a microlens by depositing photoresist bubbles on a substrate. The photoresist bubbles can be formed and deposited using an inkjet scheme. A curing process of the photoresist can be performed during formation of the photoresist bubbles before the photoresist bubbles are deposited on the substrate. In one embodiment, the photoresist bubbles can be color photoresist bubbles to form a color microlens that can function as a color filter and a microlens.
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