发明申请
- 专利标题: Method for Manufacturing Image Sensor
- 专利标题(中): 图像传感器制造方法
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申请号: US12125635申请日: 2008-05-22
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公开(公告)号: US20080293182A1公开(公告)日: 2008-11-27
- 发明人: Yong Sil Lee , Jun Sung Oh , Seung Young Jeong
- 申请人: Yong Sil Lee , Jun Sung Oh , Seung Young Jeong
- 优先权: KR10-2007-0050617 20070525
- 主分类号: H01L31/0232
- IPC分类号: H01L31/0232
摘要:
Disclosed are methods of manufacturing an image sensor. The method can include forming a microlens by depositing photoresist bubbles on a substrate. The photoresist bubbles can be formed and deposited using an inkjet scheme. A curing process of the photoresist can be performed during formation of the photoresist bubbles before the photoresist bubbles are deposited on the substrate. In one embodiment, the photoresist bubbles can be color photoresist bubbles to form a color microlens that can function as a color filter and a microlens.
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