发明申请
US20080295622A1 PLANAR RESONATOR GYROSCOPE CENTRAL DIE ATTACHMENT 有权
平面谐振器GYROSCOPE CENTRAL DIE附件

  • 专利标题: PLANAR RESONATOR GYROSCOPE CENTRAL DIE ATTACHMENT
  • 专利标题(中): 平面谐振器GYROSCOPE CENTRAL DIE附件
  • 申请号: US11757395
    申请日: 2007-06-04
  • 公开(公告)号: US20080295622A1
    公开(公告)日: 2008-12-04
  • 发明人: A. Dorian Challoner
  • 申请人: A. Dorian Challoner
  • 申请人地址: US IL Chicago
  • 专利权人: The Boeing Company
  • 当前专利权人: The Boeing Company
  • 当前专利权人地址: US IL Chicago
  • 主分类号: G01C19/28
  • IPC分类号: G01C19/28
PLANAR RESONATOR GYROSCOPE CENTRAL DIE ATTACHMENT
摘要:
Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. A gyroscope die may be attached to its package substrate on a central disc area that is inboard of its embedded electrodes. This configuration eliminates contact of the die with the package substrate beneath the embedded electrodes allowing the internal electrode support structure to expand or contract freely without stress as its temperature changes. The central attachment can also be used diminish the package temperature gradients on the periphery of the die, if the thermal conductivity of the central disc attachment material is higher than the package substrate. Temperature gradients across the resonator also lead to thermoelastic damping asymmetry and rate drift. In addition, the electrical connections to the die may be formed by vertical vias within the central disc attachment area or by thin wirebonds to peripheral I/O pads on the gyro chip.
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