发明申请
US20080296562A1 Methods and apparatus for fabricating carbon nanotubes and carbon nanotube devices
审中-公开
制造碳纳米管和碳纳米管器件的方法和装置
- 专利标题： Methods and apparatus for fabricating carbon nanotubes and carbon nanotube devices
- 专利标题（中）： 制造碳纳米管和碳纳米管器件的方法和装置
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申请号： US11806365申请日： 2007-05-31
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公开(公告)号： US20080296562A1公开(公告)日： 2008-12-04
- 发明人: James M. Murduck , John Douglas Adam , James E. Baumgardner , Aaron A. Pesetski , Hong Zhang Pesetski , John Xavier Przybysz
- 申请人： James M. Murduck , John Douglas Adam , James E. Baumgardner , Aaron A. Pesetski , Hong Zhang Pesetski , John Xavier Przybysz
- 主分类号： H01L51/40
- IPC分类号： H01L51/40 ; H01L51/30 ; C25D7/00
摘要：
Methods and apparatus for fabricating carbon nanotubes (CNTs) and carbon nanotube devices. These include a method of fabricating self-aligned CNT field-effect transistors (FET), a method and apparatus of selectively etching metallic CNTs and a method and apparatus of fabricating an oxide in a carbon nanotube (CNT) device. These methods and apparatus overcome many of the disadvantages and limitations of the prior art.
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