发明申请
- 专利标题: Extreme ultra-violet lithographic apparatus and device manufacturing method
- 专利标题(中): 极紫外光刻设备及其制造方法
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申请号: US11808264申请日: 2007-06-07
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公开(公告)号: US20080302980A1公开(公告)日: 2008-12-11
- 发明人: Jan Bernard Plechelmus Van Schoot , Johannes Hubertus Josephina Moors
- 申请人: Jan Bernard Plechelmus Van Schoot , Johannes Hubertus Josephina Moors
- 申请人地址: NL Veldhoven
- 专利权人: ASML NETHERLANDS B.V.
- 当前专利权人: ASML NETHERLANDS B.V.
- 当前专利权人地址: NL Veldhoven
- 主分类号: G21K5/00
- IPC分类号: G21K5/00 ; G03C5/04
摘要:
An extreme ultra-violet lithographic apparatus for imaging a pattern onto a substrate includes a radiation system constructed and arranged to provide a beam of an extreme ultra-violet radiation, and an absorber arranged in the beam and constructed and arranged to absorb at least a portion of the radiation beam. The absorber has a volume configured to accommodate a flow of an absorbing gas. The flow is directed in a transverse direction with respect to the beam. The absorber includes a structure having an extreme ultra-violet radiation-transmissive beam entry area and an extreme ultra-violet radiation-transmissive beam exit area. The apparatus also includes a gas inlet actuator array configured to inject the gas into the volume and a gas outlet actuator array arranged to evacuate the gas from the volume.
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