发明申请
- 专利标题: Non-volatile Memory Cells Including Fin Structures
- 专利标题(中): 包括鳍结构的非易失性存储单元
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申请号: US12193200申请日: 2008-08-18
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公开(公告)号: US20080303079A1公开(公告)日: 2008-12-11
- 发明人: Eun-Suk Cho , Choong-Ho Lee , Tae-Yong Kim
- 申请人: Eun-Suk Cho , Choong-Ho Lee , Tae-Yong Kim
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR2004-39024 20040531
- 主分类号: H01L29/00
- IPC分类号: H01L29/00
摘要:
A method of forming a non-volatile memory device may include forming a fin protruding from a substrate, forming a tunnel insulating layer on portions of the fin, and forming a floating gate on the tunnel insulting layer so that the tunnel insulating layer is between the floating gate and the fin. A dielectric layer may be formed on the floating gate so that the floating gate is between the dielectric layer and the fin, and a control gate electrode may be formed on the dielectric layer so that the dielectric layer is between the control gate and the fin. Related devices are also discussed.
公开/授权文献
- US07737485B2 Non-volatile memory cells including fin structures 公开/授权日:2010-06-15
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