发明申请
US20080303079A1 Non-volatile Memory Cells Including Fin Structures 失效
包括鳍结构的非易失性存储单元

Non-volatile Memory Cells Including Fin Structures
摘要:
A method of forming a non-volatile memory device may include forming a fin protruding from a substrate, forming a tunnel insulating layer on portions of the fin, and forming a floating gate on the tunnel insulting layer so that the tunnel insulating layer is between the floating gate and the fin. A dielectric layer may be formed on the floating gate so that the floating gate is between the dielectric layer and the fin, and a control gate electrode may be formed on the dielectric layer so that the dielectric layer is between the control gate and the fin. Related devices are also discussed.
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