发明申请
US20080305433A1 POSITIVE RESIST COMPOSITION AND METHOD OF PATTERN FORMATION WITH THE SAME
审中-公开
积极抵抗组合物及其形成图案的方法
- 专利标题: POSITIVE RESIST COMPOSITION AND METHOD OF PATTERN FORMATION WITH THE SAME
- 专利标题(中): 积极抵抗组合物及其形成图案的方法
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申请号: US12193302申请日: 2008-08-18
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公开(公告)号: US20080305433A1公开(公告)日: 2008-12-11
- 发明人: Hiromi KANDA , Shinichi Kanna , Haruki Inabe
- 申请人: Hiromi KANDA , Shinichi Kanna , Haruki Inabe
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2005-215412 20050726; JP2005-356714 20051209; JP2006-007762 20060116; JP2006-107727 20060410; JP2006-198897 20060721
- 主分类号: G03C1/053
- IPC分类号: G03C1/053
摘要:
A positive resist composition comprising: (A) a resin which comes to have an enhanced solubility in an alkaline developing solution by an action of an acid; (B) a compound which generates an acid upon irradiation with actinic rays or a radiation; (C) a fluorine-containing compound containing at least one group selected from the groups (x) to (z); and (F) a solvent, and a method of pattern formation with the composition: (x) an alkali-soluble group; (y) a group which decomposes by an action of an alkaline developing solution to enhance a solubility in an alkaline developing solution; and (z) a group which decomposes by an action of an acid.
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