发明申请
US20080305433A1 POSITIVE RESIST COMPOSITION AND METHOD OF PATTERN FORMATION WITH THE SAME 审中-公开
积极抵抗组合物及其形成图案的方法

  • 专利标题: POSITIVE RESIST COMPOSITION AND METHOD OF PATTERN FORMATION WITH THE SAME
  • 专利标题(中): 积极抵抗组合物及其形成图案的方法
  • 申请号: US12193302
    申请日: 2008-08-18
  • 公开(公告)号: US20080305433A1
    公开(公告)日: 2008-12-11
  • 发明人: Hiromi KANDAShinichi KannaHaruki Inabe
  • 申请人: Hiromi KANDAShinichi KannaHaruki Inabe
  • 申请人地址: JP Tokyo
  • 专利权人: FUJIFILM Corporation
  • 当前专利权人: FUJIFILM Corporation
  • 当前专利权人地址: JP Tokyo
  • 优先权: JP2005-215412 20050726; JP2005-356714 20051209; JP2006-007762 20060116; JP2006-107727 20060410; JP2006-198897 20060721
  • 主分类号: G03C1/053
  • IPC分类号: G03C1/053
POSITIVE RESIST COMPOSITION AND METHOD OF PATTERN FORMATION WITH THE SAME
摘要:
A positive resist composition comprising: (A) a resin which comes to have an enhanced solubility in an alkaline developing solution by an action of an acid; (B) a compound which generates an acid upon irradiation with actinic rays or a radiation; (C) a fluorine-containing compound containing at least one group selected from the groups (x) to (z); and (F) a solvent, and a method of pattern formation with the composition: (x) an alkali-soluble group; (y) a group which decomposes by an action of an alkaline developing solution to enhance a solubility in an alkaline developing solution; and (z) a group which decomposes by an action of an acid.
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