发明申请
- 专利标题: CHANNEL STRAIN ENGINEERING IN FIELD-EFFECT-TRANSISTOR
- 专利标题(中): 场效应晶体管中的通道应变工程
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申请号: US11760056申请日: 2007-06-08
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公开(公告)号: US20080305621A1公开(公告)日: 2008-12-11
- 发明人: Thomas Dyer , Rajendran Krishnasamy , Jin-Ping Han , Ernst Demm
- 申请人: Thomas Dyer , Rajendran Krishnasamy , Jin-Ping Han , Ernst Demm
- 申请人地址: US NY Armonk US CA Milpitas
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION,INFINEON TECHNOLOGIES NORTH AMERICA CORP.
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION,INFINEON TECHNOLOGIES NORTH AMERICA CORP.
- 当前专利权人地址: US NY Armonk US CA Milpitas
- 主分类号: H01L21/3205
- IPC分类号: H01L21/3205
摘要:
There is disclosed a method of applying stress to a channel region underneath a gate of a field-effect-transistor, which includes the gate, a source region, and a drain region. The method includes steps of embedding stressors in the source and drain regions of the FET; forming a stress liner covering the gate and the source and drain regions; removing a portion of the stress liner, the portion of the stress liner being located on top of the gate of the FET; removing at least a substantial portion of the gate of a first gate material and thus creating an opening therein; and filling the opening with a second gate material.
公开/授权文献
- US07842592B2 Channel strain engineering in field-effect-transistor 公开/授权日:2010-11-30
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