发明申请
- 专利标题： IN-CHAMBER ELECTRON DETECTOR
- 专利标题（中）： 室内电子探测器
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申请号： US12141723申请日： 2008-06-18
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公开(公告)号： US20080308742A1公开(公告)日： 2008-12-18
- 发明人: Robert Gerlach , Mostafa Maazouz , Trevor Dingle
- 申请人： Robert Gerlach , Mostafa Maazouz , Trevor Dingle
- 申请人地址： US OR Hillsboro
- 专利权人： FEI COMPANY
- 当前专利权人： FEI COMPANY
- 当前专利权人地址： US OR Hillsboro
- 主分类号： H01J3/14
- IPC分类号： H01J3/14
摘要：
A secondary particle detector 302 for a charged particle beam system 300 includes a scintillator 304 and a transducer 312, such as a photomultiplier tube, positioned within a vacuum chamber 107. Unlike prior art Everhart-Thornley detectors, the photomultiplier is positioned within the vacuum chamber, which improves detection by eliminating optical couplings and provides flexibility in positioning the detector.
公开/授权文献
- US08164059B2 In-chamber electron detector 公开/授权日：2012-04-24
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