Invention Application
- Patent Title: Piezo-resistive detection resonant device made using surface technologies
- Patent Title (中): 使用表面技术制造的压电检测谐振装置
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Application No.: US12214627Application Date: 2008-06-20
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Publication No.: US20080314148A1Publication Date: 2008-12-25
- Inventor: Philippe Robert
- Applicant: Philippe Robert
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE
- Current Assignee Address: FR Paris
- Priority: FR0755992 20070625
- Main IPC: G01P15/12
- IPC: G01P15/12 ; G01L1/22
Abstract:
This invention relates to a resonant device with detection in the piezo-resistive plane made using surface technologies on a bulk, which comprises a resonator connected to this bulk by at least one embedded portion, means of exciting this resonator and detection means comprising at least one suspended beam type strain gauge made from piezo-resistive material, in which each strain gauge has a common plane with the resonator, and is connected to this resonator at a point situated outside of this at least one embedded portion to increase the stress observed by this strain gauge.
Public/Granted literature
- US08156807B2 Piezo-resistive detection resonant device made using surface technologies Public/Granted day:2012-04-17
Information query
IPC分类:
