发明申请
US20080315134A1 OPTICAL SYSTEM FOR RADIATION IN THE EUV-WAVELENGTH RANGE AND METHOD FOR MEASURING A CONTAMINATION STATUS OF EUV-REFLECTIVE ELEMENTS
有权
用于辐射EUV波长范围的光学系统和测量EUV反射元件的污染状态的方法
- 专利标题: OPTICAL SYSTEM FOR RADIATION IN THE EUV-WAVELENGTH RANGE AND METHOD FOR MEASURING A CONTAMINATION STATUS OF EUV-REFLECTIVE ELEMENTS
- 专利标题(中): 用于辐射EUV波长范围的光学系统和测量EUV反射元件的污染状态的方法
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申请号: US11855849申请日: 2007-09-14
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公开(公告)号: US20080315134A1公开(公告)日: 2008-12-25
- 发明人: Dirk Heinrich EHM , Hermann Bieg , Hans-Juergen Mann , Stephan Muellender , Johannes Hubertus Josephina Moors , Bastian Theodor Wolschrijn
- 申请人: Dirk Heinrich EHM , Hermann Bieg , Hans-Juergen Mann , Stephan Muellender , Johannes Hubertus Josephina Moors , Bastian Theodor Wolschrijn
- 申请人地址: DE Oberkochen NL Veldhoven
- 专利权人: Carl Zeiss SMT AG,ASML Netherlands B.V.
- 当前专利权人: Carl Zeiss SMT AG,ASML Netherlands B.V.
- 当前专利权人地址: DE Oberkochen NL Veldhoven
- 优先权: EP06019265.5-2222 20060914
- 主分类号: A61N5/06
- IPC分类号: A61N5/06 ; G03B27/54
摘要:
An optical system for radiation in the EUV wavelength range, in particular a projection exposure apparatus, having at least one vacuum vessel, including: at least one EUV-reflective optical element arranged in an optical path, and a holder which includes at least one sample element, the sample element having an optical surface which is exposed to incident EUV-radiation outside of the optical path, the sample element being sensitive to chemical alterations under influence of the incident EUV-radiation which also affect the optical element. The optical system further includes at least one detection unit for online detection of the contamination status of the sample element during exposure of the sample element to the incident EUV-radiation.
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