发明申请
US20080315280A1 SEMICONDUCTOR MEMORY DEVICE HAVING MEMORY CELL UNIT AND MANUFACTURING METHOD THEREOF
审中-公开
具有存储单元的半导体存储器件及其制造方法
- 专利标题: SEMICONDUCTOR MEMORY DEVICE HAVING MEMORY CELL UNIT AND MANUFACTURING METHOD THEREOF
- 专利标题(中): 具有存储单元的半导体存储器件及其制造方法
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申请号: US12142274申请日: 2008-06-19
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公开(公告)号: US20080315280A1公开(公告)日: 2008-12-25
- 发明人: Shinichi WATANABE , Fumitaka Arai , Makoto Mizukami , Hirofumi Inoue , Masaki Kondo
- 申请人: Shinichi WATANABE , Fumitaka Arai , Makoto Mizukami , Hirofumi Inoue , Masaki Kondo
- 优先权: JP2007-165365 20070622
- 主分类号: H01L29/423
- IPC分类号: H01L29/423 ; H01L21/336
摘要:
A semiconductor memory device includes a silicon substrate including a first region which has a buried insulating layer below a single-crystal silicon layer and a second region which does not have the buried insulating layer below the single-crystal silicon layer, at least one memory cell transistor which has a first gate electrode, the first gate electrode being provided on the single-crystal silicon layer in the first region, and at least one selective gate transistor which has a second gate electrode and is provided on the single-crystal silicon layer in the first region. The one selective gate transistor is provided in such a manner that a part of the second gate electrode is placed on the single-crystal silicon layer in the second region.
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