发明申请
- 专利标题: Micromechanical Component and Manufacturing Method
- 专利标题(中): 微机械部件和制造方法
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申请号: US12090566申请日: 2006-11-29
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公开(公告)号: US20080315332A1公开(公告)日: 2008-12-25
- 发明人: Arnd Kaelberer , Jens Frey
- 申请人: Arnd Kaelberer , Jens Frey
- 优先权: DE102005059905.2 20051215
- 国际申请: PCT/EP06/69044 WO 20061129
- 主分类号: H01L29/84
- IPC分类号: H01L29/84 ; H01L21/00 ; G11B5/65
摘要:
A micromechanical component has a substrate, a first intermediate layer which is situated thereupon, and a first layer which is situated thereupon and is structured down to the first intermediate layer. A second intermediate layer is situated above the first layer. A second layer is situated on the former, at least one movable micromechanical structure being structured into the second layer. The second intermediate layer is removed in a sacrificial zone beneath the movable micromechanical structure and the first intermediate layer is partially removed in zones beneath the first layer. The movable micromechanical structure is provided with at least one stop surface on a bottom face, this stop surface being contactable with a zone of the first layer which is supported by the first intermediate layer by deflection of the movable micromechanical structure. A method for producing such a micromechanical component is also described.
公开/授权文献
- US07919346B2 Micromechanical component and manufacturing method 公开/授权日:2011-04-05
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