发明申请
- 专利标题: MEMS DEVICE WITH BI-DIRECTIONAL ELEMENT
- 专利标题(中): 具有双向元件的MEMS器件
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申请号: US11772039申请日: 2007-06-29
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公开(公告)号: US20090002118A1公开(公告)日: 2009-01-01
- 发明人: Arman Gasparyan , John VanAtta Gates, II , Maria Elina Simon
- 申请人: Arman Gasparyan , John VanAtta Gates, II , Maria Elina Simon
- 申请人地址: US NJ Murray Hill
- 专利权人: Lucent Technologies Inc.
- 当前专利权人: Lucent Technologies Inc.
- 当前专利权人地址: US NJ Murray Hill
- 主分类号: H01H71/18
- IPC分类号: H01H71/18 ; H01H61/00
摘要:
The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
公开/授权文献
- US07760065B2 MEMS device with bi-directional element 公开/授权日:2010-07-20
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