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公开(公告)号：US08427727B2
公开(公告)日：2013-04-23
申请号：US12357734
申请日：2009-01-22
申请人： Gang Chen , Roland Ryf , Maria Elina Simon
发明人： Gang Chen , Roland Ryf , Maria Elina Simon
IPC分类号： G02B26/08
CPC分类号： H04N9/3161 , G02B5/02 , G02B26/101 , G02B26/105 , G03B21/005 , H04N9/3129 , H04N9/315
摘要： An apparatus includes a substrate and a mirror. The mirror is attached to the substrate via a spring. An electro-mechanical driver is operable to cause the mirror to rotationally oscillate about first and second non-collinear axes at different first and second frequencies.
摘要翻译： 一种装置包括基板和反射镜。 镜子通过弹簧连接到基底上。 机电驱动器可操作以使得反射镜以不同的第一和第二频率围绕第一和第二非共轴线旋转振荡。
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公开(公告)号：US08063456B2
公开(公告)日：2011-11-22
申请号：US11519623
申请日：2006-09-12
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H2001/0042 , Y10T29/49105
摘要： An apparatus includes a mechanical switch. The mechanical switch includes a bilayer with first and second stable curved states. A transformation of the bilayer from the first state to the second state closes the switch.
摘要翻译： 一种装置包括机械开关。 机械开关包括具有第一和第二稳定弯曲状态的双层。 将双层从第一状态转换为第二状态关闭开关。
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公开(公告)号：US07760065B2
公开(公告)日：2010-07-20
申请号：US11772039
申请日：2007-06-29
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H37/00 , H01H2001/0047 , H01H2037/008 , H01H2061/006 , H01H2061/008
摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
摘要翻译： 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。
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公开(公告)号：US07580175B2
公开(公告)日：2009-08-25
申请号：US11766414
申请日：2007-06-21
申请人： Vladimir Anatolyevich Aksyuk , Cristian A. Bolle , Christopher D. W. Jones , Flavio Pardo , Roland Ryf , Maria Elina Simon
发明人： Vladimir Anatolyevich Aksyuk , Cristian A. Bolle , Christopher D. W. Jones , Flavio Pardo , Roland Ryf , Maria Elina Simon
CPC分类号： G01J5/40
摘要： A representative embodiment of the invention provides an infrared (IR) detector having a movable plate supported at an offset distance from a substrate by a suspension arm. In response to a temperature difference between the plate and the substrate generated by the incident IR radiation, the suspension arm deforms and changes the offset distance for the plate. In one embodiment, the suspension arm has three rod-shaped bimorph transducers that lie within a plane that is parallel to the substrate. The transducers are also parallel to one another, with the transducer that is attached to an anchor of the suspension arm being located between the two transducers that are attached to the plate.
摘要翻译： 本发明的代表性实施例提供一种红外（IR）检测器，其具有通过悬架臂与基板偏移距离支撑的可移动板。 响应于由入射的IR辐射产生的板和衬底之间的温度差，悬架臂变形并改变板的偏移距离。 在一个实施例中，悬架臂具有位于平行于基板的平面内的三个棒状双压电晶片换能器。 换能器也彼此平行，其中附接到悬架臂的锚定件的换能器位于连接到板的两个换能器之间。
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公开(公告)号：US20090185251A1
公开(公告)日：2009-07-23
申请号：US12357734
申请日：2009-01-22
申请人： Gang Chen , Roland Ryf , Maria Elina Simon
发明人： Gang Chen , Roland Ryf , Maria Elina Simon
IPC分类号： G02B26/08
CPC分类号： H04N9/3161 , G02B5/02 , G02B26/101 , G02B26/105 , G03B21/005 , H04N9/3129 , H04N9/315
摘要： An apparatus includes a substrate and a mirror. The mirror is attached to the substrate via a spring. An electro-mechanical driver is operable to cause the mirror to rotationally oscillate about first and second non-collinear axes at different first and second frequencies.
摘要翻译： 一种装置包括基板和反射镜。 镜子通过弹簧连接到基底上。 机电驱动器可操作以使得反射镜以不同的第一和第二频率围绕第一和第二非共轴线旋转振荡。
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公开(公告)号：US07564138B2
公开(公告)日：2009-07-21
申请号：US11020590
申请日：2004-12-23
申请人： Flavio Pardo , Maria Elina Simon
发明人： Flavio Pardo , Maria Elina Simon
CPC分类号： H01L24/83 , B81B2201/042 , B81C3/001 , B81C2203/0181 , B81C2203/032 , H01L23/345 , H01L24/29 , H01L24/90 , H01L25/50 , H01L2224/83191 , H01L2224/83234 , H01L2224/8385 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/07802 , H01L2924/14
摘要： Targeted heating is employed to essentially only heat a material that is used as a spacer and to bond a first chip of a flip-chip to a second chip thereof and not the rest of the chips. In order to heat only the spacer-bonding material, one or more wires are located within, or adjacent to, the spacer-bonding material, and an electrical current is passed through the one or more wires causing them to heat. At the time of final bonding the heat generated by the one or more wires causes the spacer-bonding material to heat to its final curing temperature.
摘要翻译： 采用目标加热基本上仅加热用作间隔物的材料，并将倒装芯片的第一芯片连接到其第二芯片而不是芯片的其余部分。 为了仅加热间隔物接合材料，一个或多个电线位于隔离物接合材料的内部或邻近隔离物接合材料，电流通过一根或多根导线使其发热。 在最终接合时，由一根或多根线产生的热量使间隔物接合材料加热到其最终的固化温度。
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公开(公告)号：US07471184B1
公开(公告)日：2008-12-30
申请号：US11866154
申请日：2007-10-02
CPC分类号： B81B3/0072 , B81B2201/032 , H01H61/04 , H01H2061/006 , H01H2061/008
摘要： An apparatus comprising a microelectromechanical system (MEMS) device. The MEMS device includes a substrate having an anchoring pad thereon and a structural element. The structural element has a beam that includes a first part and a second part. The first part is attached to both the anchoring pad and to the second part. The second part is movable with respect to the substrate and made of an electrically conductive material. Additionally, at least one of the following conditions hold: the first part is made of a material having: a first yield stress that is greater than a second yield stress of the electrically conductive material of the second part; a fatigue resistance that is greater than a second fatigue resistance of the electrically conductive material of the second part; or, a creep rate that is less than a second creep rate of the electrically conductive material of the second part.
摘要翻译： 一种包括微机电系统（MEMS）装置的装置。 MEMS器件包括其上具有锚定垫的衬底和结构元件。 结构元件具有包括第一部分和第二部分的梁。 第一部分连接到锚固垫和第二部分。 第二部分可相对于基板移动并由导电材料制成。 另外，以下条件中的至少一个成立：第一部分由具有第二部分的导电材料的第二屈服应力的第一屈服应力的材料制成; 大于第二部分的导电材料的第二耐疲劳性的耐疲劳性; 或者小于第二部分的导电材料的第二蠕变速率的蠕变速率。
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公开(公告)号：US08361825B2
公开(公告)日：2013-01-29
申请号：US13270600
申请日：2011-10-11
IPC分类号： H01L21/00
CPC分类号： H01H59/0009 , H01H2001/0042 , Y10T29/49105
摘要： An apparatus includes a mechanical switch. The mechanical switch includes a bilayer with first and second stable curved states. A transformation of the bilayer from the first state to the second state closes the switch.
摘要翻译： 一种装置包括机械开关。 机械开关包括具有第一和第二稳定弯曲状态的双层。 将双层从第一状态转换为第二状态关闭开关。
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公开(公告)号：US20120023738A1
公开(公告)日：2012-02-02
申请号：US13270600
申请日：2011-10-11
IPC分类号： H01H11/00
CPC分类号： H01H59/0009 , H01H2001/0042 , Y10T29/49105
摘要： An apparatus includes a mechanical switch. The mechanical switch includes a bilayer with first and second stable curved states. A transformation of the bilayer from the first state to the second state closes the switch.
摘要翻译： 一种装置包括机械开关。 机械开关包括具有第一和第二稳定弯曲状态的双层。 将双层从第一状态转换为第二状态关闭开关。
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公开(公告)号：US20100182120A1
公开(公告)日：2010-07-22
申请号：US12732752
申请日：2010-03-26
IPC分类号： H01H61/01
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H37/00 , H01H2001/0047 , H01H2037/008 , H01H2061/006 , H01H2061/008
摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
摘要翻译： 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。
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