发明申请
US20090002833A1 Optical System and Method for Shaping a Profile of a Laser Beam
有权
用于形成激光束轮廓的光学系统和方法
- 专利标题: Optical System and Method for Shaping a Profile of a Laser Beam
- 专利标题(中): 用于形成激光束轮廓的光学系统和方法
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申请号: US12097937申请日: 2006-12-20
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公开(公告)号: US20090002833A1公开(公告)日: 2009-01-01
- 发明人: Vitaliy Shklover , Holger Muenz , Michel Le Maire , Christian Hoess
- 申请人: Vitaliy Shklover , Holger Muenz , Michel Le Maire , Christian Hoess
- 申请人地址: DE Oberkochen
- 专利权人: CARL ZEISS SMT AG
- 当前专利权人: CARL ZEISS SMT AG
- 当前专利权人地址: DE Oberkochen
- 国际申请: PCT/EP06/12350 WO 20061220
- 主分类号: G02B27/09
- IPC分类号: G02B27/09
摘要:
An optical system for shaping an incoming beam having a divergence with an angular distribution at least in a first direction comprises at least one angle selective optical element for clipping the angular distribution in the at least first direction. The approach according to the present invention bases on using an angle-selective device operated by the principle of total internal reflection to reduce divergence of the incoming beam, in contrast to a spatially-selective device as for example a field-stop or slit. The method according to the present invention has the advantage that no physical sharp edges have to be exposed at high energy densities. Thus, thermal impact and demands on the optical elements to withstand a high power laser beam are significantly reduced.