发明申请
- 专利标题: INTEGRATED PHOTONIC SEMICONDUCTOR DEVICES HAVING RIDGE STRUCTURES THAT ARE GROWN RATHER THAN ETCHED, AND METHODS FOR MAKING SAME
- 专利标题(中): 一体化的光电半导体器件,具有被烧蚀的RIDGE结构及其制造方法
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申请号: US11768214申请日: 2007-06-26
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公开(公告)号: US20090003396A1公开(公告)日: 2009-01-01
- 发明人: Simone Codato , Fang Ruiyu , Rigo Cesare , Guido Alberto Roggero , Marzia Rosso
- 申请人: Simone Codato , Fang Ruiyu , Rigo Cesare , Guido Alberto Roggero , Marzia Rosso
- 主分类号: H01S5/026
- IPC分类号: H01S5/026 ; H01L33/00
摘要:
A SAG technique is used to grow the ridge structure in a photonic semiconductor device, such as an electroabsorption modulator integrated with a distributed feedback laser (EML) assembly. The adoption of this SAG technique to grow the ridge structure results in the formation of a self-assembled and self-aligned ridge structure that has a very precise configuration. The use of this process enables straight, bent and tilted ridge structures to be formed with high precision. In addition, because the ridge structure is self-assembled and self-aligned, a lesser number of processing steps are required to create the photonic device in comparison to the known approach that uses wet chemical etching techniques to form the ridge structure. The high precision of the ridge structure and the lesser number of processing steps needed to create the device increase manufacturing yield and allow overall cost of the device to be reduced.
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