发明申请
- 专利标题: Polishing apparatus and polishing method
- 专利标题(中): 抛光设备和抛光方法
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申请号: US12213186申请日: 2008-06-16
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公开(公告)号: US20090004952A1公开(公告)日: 2009-01-01
- 发明人: Tamami Takahashi , Masaya Seki , Hiroaki Kusa , Kenya Ito
- 申请人: Tamami Takahashi , Masaya Seki , Hiroaki Kusa , Kenya Ito
- 优先权: JP2007-171959 20070629
- 主分类号: B24B21/02
- IPC分类号: B24B21/02 ; B24B21/22
摘要:
A polishing apparatus according to the present invention is suitable for use in polishing a periphery of a substrate such as a semiconductor wafer. The polishing apparatus includes a holding section configured to hold the workpiece, a polishing head configured to bring the polishing tape into contact with the workpiece, a supply reel configured to supply the polishing tape to the polishing head, a rewind reel configured to rewind the polishing tape that has contacted the workpiece, and a swinging mechanism configured to cause the polishing head to perform a swinging motion with its pivot lying on a predetermined point.
公开/授权文献
- US07976361B2 Polishing apparatus and polishing method 公开/授权日:2011-07-12
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