发明申请
- 专利标题: SEMICONDUCTOR DEVICE HAVING THROUGH ELECTRODE AND METHOD OF FABRICATING THE SAME
- 专利标题(中): 具有电极的半导体器件及其制造方法
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申请号: US12132925申请日: 2008-06-04
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公开(公告)号: US20090008790A1公开(公告)日: 2009-01-08
- 发明人: Ho-Jin LEE , Nam-Seog KIM , Yong-Chai KWON , Hyun-Soo CHUNG , In-Young LEE , Son-Kwan HWANG
- 申请人: Ho-Jin LEE , Nam-Seog KIM , Yong-Chai KWON , Hyun-Soo CHUNG , In-Young LEE , Son-Kwan HWANG
- 申请人地址: KR Gyeonggi-do
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Gyeonggi-do
- 优先权: KR2007-0066168 20070702
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
A semiconductor device having a through electrode and a method of fabricating the same are disclosed. In one embodiment, a semiconductor device includes a first insulating layer formed on a semiconductor substrate. A wiring layer having a first aperture to expose a portion of the first insulating layer is formed on the first insulating layer. A second insulating layer is formed on an upper portion of the wiring layer and in the first aperture. A conductive pad having a second aperture to expose a portion of the second insulating layer is formed on the second insulating layer. A through hole with a width narrower than widths of the first and second apertures is formed through the first and second insulating layers and an upper portion of the semiconductor substrate. A through electrode is formed in the through hole.
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