Invention Application
- Patent Title: DETECTOR FOR ELECTRON COLUMN AND METHOD FOR DETECTING ELECTRONS FOR ELECTRON COLUMN
- Patent Title (中): 电子探针检测器及检测电子束电子的方法
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Application No.: US12064071Application Date: 2006-08-18
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Publication No.: US20090014650A1Publication Date: 2009-01-15
- Inventor: Ho Seob Kim
- Applicant: Ho Seob Kim
- Priority: KR10-2005-0075519 20050818
- International Application: PCT/KR2006/003265 WO 20060818
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
In a conventional micro-channel plate (MCP), a secondary electron (SE) detector or a semi-conductor detector the number of the electrons is amplified through its own structure. For such amplification a small voltage difference is applied externally or generated due to its own structure and material. The electric current of electrons undergoing the above-described procedure is amplified by an external amplification circuit. In the present invention electrons—resulting from the collision of the electron beam generated by a microcolumn—are detected by surrounding conductive wiring. The detected electrons are amplified using an amplification circuit on the outside similar to a conventional detection method.
Public/Granted literature
- US08324573B2 Detector for electron column and method for detecting electrons for electron column Public/Granted day:2012-12-04
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