Invention Application
US20090014650A1 DETECTOR FOR ELECTRON COLUMN AND METHOD FOR DETECTING ELECTRONS FOR ELECTRON COLUMN 有权
电子探针检测器及检测电子束电子的方法

  • Patent Title: DETECTOR FOR ELECTRON COLUMN AND METHOD FOR DETECTING ELECTRONS FOR ELECTRON COLUMN
  • Patent Title (中): 电子探针检测器及检测电子束电子的方法
  • Application No.: US12064071
    Application Date: 2006-08-18
  • Publication No.: US20090014650A1
    Publication Date: 2009-01-15
  • Inventor: Ho Seob Kim
  • Applicant: Ho Seob Kim
  • Priority: KR10-2005-0075519 20050818
  • International Application: PCT/KR2006/003265 WO 20060818
  • Main IPC: G01N23/00
  • IPC: G01N23/00
DETECTOR FOR ELECTRON COLUMN AND METHOD FOR DETECTING ELECTRONS FOR ELECTRON COLUMN
Abstract:
In a conventional micro-channel plate (MCP), a secondary electron (SE) detector or a semi-conductor detector the number of the electrons is amplified through its own structure. For such amplification a small voltage difference is applied externally or generated due to its own structure and material. The electric current of electrons undergoing the above-described procedure is amplified by an external amplification circuit. In the present invention electrons—resulting from the collision of the electron beam generated by a microcolumn—are detected by surrounding conductive wiring. The detected electrons are amplified using an amplification circuit on the outside similar to a conventional detection method.
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