公开(公告)号：US09666407B2

公开(公告)日：2017-05-30

申请号：US14631330

申请日：2015-02-25

申请人： Tae Sik Oh ,  Ho Seob Kim ,  Dae Wook Kim

发明人： Tae Sik Oh ,  Ho Seob Kim ,  Dae Wook Kim

IPC分类号： H01J37/147 ,  H01J37/073 ,  H01J37/26 ,  H01J9/02

CPC分类号： H01J37/1477 ,  H01J9/02 ,  H01J37/073 ,  H01J37/26 ,  H01J2237/04924 ,  H01J2237/1516

摘要： Disclosed is an electrostatic quadrupole deflector for a microcolumn. The deflector includes an electron beam passage hole, deflecting electrodes to which a deflection voltage is applied, and floating electrodes to which the deflection voltage is not applied. The deflector is structurally stable and has a simple driving system. The deflector has good performance and characteristics.

公开(公告)号：US08071955B2

公开(公告)日：2011-12-06

申请号：US12600266

申请日：2008-05-15

申请人： Ho Seob Kim ,  Young Chul Kim

发明人： Ho Seob Kim ,  Young Chul Kim

IPC分类号： H01J3/26 ,  H01J37/14 ,  H01J37/147

CPC分类号： H01J37/147 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1205 ,  H01J2237/152 ,  H01J2237/1532

摘要： The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or functioning as a stigmator using a magnetic field. The deflector (100) according to the present invention includes one or more deflector electrodes. Each of the deflector electrodes includes a core (12) made of a conductor or a semiconductor, and a coil (11) wound around the core (12).

摘要翻译： 本发明一般涉及用于产生电子束的微柱偏转器，更具体地，涉及一种能够扫描或移动电子束或用作使用磁场的标称器的偏转器。 根据本发明的偏转器（100）包括一个或多个偏转器电极。 每个偏转器电极包括由导体或半导体制成的芯体（12）和缠绕在芯部（12）上的线圈（11）。

公开(公告)号：US20080315096A1

公开(公告)日：2008-12-25

申请号：US11792156

申请日：2005-09-01

申请人： Ho Seob Kim ,  Byeng Jin Kim

发明人： Ho Seob Kim ,  Byeng Jin Kim

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  G01N23/04 ,  H01J37/04 ,  H01J37/185 ,  H01J2237/0245 ,  H01J2237/04924 ,  H01J2237/1205 ,  H01J2237/1503 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/204

摘要： Provided is a portable electron microscope using a microcolumn. The portable electron microscope includes a microcolumn, a low vacuum pump, a high vacuum pump, an ultra-high vacuum ion pump, a first chamber for receiving and fixing the microcolumn and a sample to be measured and forming a vacuum by means of the pumps, a controller, and a case for receiving the pumps, the chamber and the controller.

摘要翻译： 提供了使用微柱的便携式电子显微镜。 便携式电子显微镜包括微柱，低真空泵，高真空泵，超高真空离子泵，用于接收和固定微柱的第一室和待测量的样品并通过泵形成真空 ，控制器和用于接收泵，腔室和控制器的壳体。

公开(公告)号：US20080211380A1

公开(公告)日：2008-09-04

申请号：US11573612

申请日：2005-08-11

申请人： Ho Seob Kim ,  Byeng Jin Kim

发明人： Ho Seob Kim ,  Byeng Jin Kim

IPC分类号： H01J1/62

CPC分类号： H01J31/127

摘要： Provided is a scanning field emission display (SFED). The SFED includes an electron emitter and a module for inducing electron emission of the electron emitter and deflecting an electron beam. A multi-SFED may be realized as a large-sized thin and flat display by arranging in an n×m array.

摘要翻译： 提供了扫描场发射显示（SFED）。 SFED包括电子发射器和用于诱导电子发射体的电子发射和偏转电子束的模块。 多SFED可以通过以n×m阵列排列而实现为大尺寸的薄型平板显示器。

公开(公告)号：US08912506B2

公开(公告)日：2014-12-16

申请号：US12278219

申请日：2007-02-02

申请人： Ho Seob Kim

发明人： Ho Seob Kim

IPC分类号： G01F23/00 ,  H01J37/18

CPC分类号： H01J37/18 ,  H01J2237/1205 ,  H01J2237/188

摘要： Disclosed is a device for sustaining different vacuum degrees for an electron column, including an electron emitter, a lens part, and a housing for securing them, to maintain the electron column and a sample under different vacuum degrees. The device comprises a column housing coupling part coupled to the housing to isolate a vacuum; a hollow part defined through the center portion of the device to allow an electron beam emitted from the electron column to pass therethrough; and a vacuum isolation part having a structure of a gasket for vacuum coupling, wherein a difference of no less than 10 torr in a vacuum degree is maintained between both sides of the device by selecting an appropriate diameter of a lens electrode layer which is finally positioned in a path along which the electron beam is emitted or by using the hollow part.

摘要翻译： 公开了一种用于维持用于电子柱的不同真空度的装置，包括电子发射器，透镜部分和用于固定它们的壳体，以保持电子柱和样品处于不同的真空度。 该装置包括一个联接到壳体上的柱壳体联接部分以隔离真空; 通过装置的中心部分限定出允许从电子塔发射的电子束通过的中空部分; 以及具有用于真空联接的衬垫的结构的真空隔离部分，其中通过选择最终定位的透镜电极层的适当直径，在装置的两侧之间保持真空度不小于10托的差异 在发射电子束的路径中或通过使用中空部分。

公开(公告)号：US20110079731A1

公开(公告)日：2011-04-07

申请号：US12994944

申请日：2009-05-27

申请人： Ho Seob Kim

发明人： Ho Seob Kim

IPC分类号： H01J3/18

CPC分类号： H01J37/12 ,  H01J37/28 ,  H01J2237/1205 ,  H01J2237/121 ,  H01J2237/153 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/1536

摘要： The present invention relates to an electron lens for use in an microcolumn, and more particularly to a multipole electron lens wherein the electron lens includes two or more electrode layers, each of the electrode layers has a slit aperture extending across a central optical axis along which an electron beam passes, and the two electrode layers are aligned on an electron optical axis such that the slit apertures are staggered with each other. Further, the present invention relates to a microcolumn using the multipole lens. The multipole lens according to the present invention can be manufactured and controlled in a simple fashion, reduces the defocusing of the microcolumn, and increases an active deflection area.

摘要翻译： 本发明涉及一种用于微柱的电子透镜，更具体地说，涉及一种多极电子透镜，其中电子透镜包括两个或更多个电极层，每个电极层具有沿中心光轴延伸的狭缝孔， 电子束通过，并且两个电极层在电子光轴上对齐，使得狭缝孔彼此交错。 此外，本发明涉及使用多极透镜的微柱。 根据本发明的多极镜头可以以简单的方式制造和控制，减少了微柱的散焦，并增加了主动偏转面积。

公开(公告)号：US20100200766A1

公开(公告)日：2010-08-12

申请号：US12670703

申请日：2008-07-28

申请人： Ho Seob Kim

发明人： Ho Seob Kim

IPC分类号： H01J31/00 ,  H01J3/14 ,  H01J3/26 ,  H01J1/02

CPC分类号： H01J37/065 ,  H01J37/073 ,  H01J2237/0492 ,  H01J2237/06341 ,  H01J2237/1205 ,  H01J2237/28 ,  H01J2237/3175

摘要： The present invention relates to an electron emitter having a nanostructure tip and an electron column using the same, and, more particularly, to an electron emitter which includes a nanostructure tip which can easily emit electrons, composed of carbon nanotube (CNT), zinc oxide nanotube (ZnO nanotube), zinc oxide nanorod, zinc oxide nanopillar, zinc oxide nanowire, zinc oxide nanoparticle or the like, and an electron column using the same.

摘要翻译： 本发明涉及一种具有纳米结构的电子发射体和使用该电子发射体的电子发射体，更具体地说，涉及包含能够容易地发射电子的纳米结构尖端的电子发射体，其由碳纳米管（CNT），氧化锌 纳米管（ZnO纳米管），氧化锌纳米棒，氧化锌纳米柱，氧化锌纳米线，氧化锌纳米颗粒等，以及使用该纳米管的电子柱。

公开(公告)号：US20090152461A1

公开(公告)日：2009-06-18

申请号：US12295770

申请日：2007-04-03

申请人： Ho Seob Kim

发明人： Ho Seob Kim

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  G01R31/307 ,  H01J37/244 ,  H01J2237/0635 ,  H01J2237/22 ,  H01J2237/244 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/281 ,  H01J2237/2817 ,  H01J2237/317 ,  H01L22/12 ,  H01L22/14

摘要： Disclosed herein is an apparatus and method for inspecting the via holes of a semiconductor device using electron beams. The apparatus includes electron beam irradiation means, a current measuring means, and a current measuring means and data processing means. The electron beam irradiation means radiate respective electron beams to inspect a plurality of inspection target holes. The current measuring means measures current, which is generated by irradiating the electron beams, radiated from the electron beam irradiation means, through a conductive layer located under the holes, or through the conductive layer and a separate detector. The data processing means processes data acquired through the measurement of the current measuring means.

摘要翻译： 本发明公开了一种使用电子束检查半导体器件的通孔的装置和方法。 该装置包括电子束照射装置，电流测量装置以及电流测量装置和数据处理装置。 电子束照射装置照射各个电子束来检查多个检查目标孔。 电流测量装置测量通过从电子束照射装置辐射的电子束通过位于孔下面的导电层或通过导电层和单独的检测器照射而产生的电流。 数据处理装置处理通过测量当前测量装置获得的数据。

公开(公告)号：US20140209813A1

公开(公告)日：2014-07-31

申请号：US13752040

申请日：2013-01-28

申请人： Ho Seob Kim ,  Dae Wook Kim ,  Seung Jun Ahn ,  Tae Sik Oh

发明人： Ho Seob Kim ,  Dae Wook Kim ,  Seung Jun Ahn ,  Tae Sik Oh

IPC分类号： G21K1/08

CPC分类号： G21K5/04 ,  H01J37/045 ,  H01J37/28 ,  H01J2237/045 ,  H01J2237/15 ,  H01J2237/30483

摘要： Disclosed herein is a multi-particle beam column including electrode layer with eccentric apertures. The multi-particle beam column includes two or more particle beam columns each comprising a particle beam emission source, a deflector, and two or more electrode layers. The multi-particle beam column includes at least one electrode layer having one or more apertures that are eccentric from respective beam optical axes of the particle beam columns.

摘要翻译： 本文公开了包括具有偏心孔的电极层的多粒子束柱。 多粒子束柱包括两个或更多个粒子束柱，每个粒子束柱包括粒子束发射源，偏转器和两个或更多个电极层。 多粒子束柱包括至少一个具有一个或多个孔的至少一个电极层，所述孔径与颗粒束柱的各个光束轴线偏心。

公开(公告)号：US08044351B2

公开(公告)日：2011-10-25

申请号：US11915679

申请日：2006-05-29

申请人： Ho Seob Kim ,  Byeng Jin Kim

发明人： Ho Seob Kim ,  Byeng Jin Kim

IPC分类号： G21K5/04

CPC分类号： H01J3/18 ,  H01J3/26 ,  H01J37/12 ,  H01J2237/0492 ,  H01J2237/1205

摘要： The present invention relates to an electron column including an electron emission source and lenses, and, more particularly, to an electron column having a structure that can facilitate the alignment and assembly of an electron emission source and lenses. The electron column having an electron emission source and a lens unit according to the present invention is characterized in that the lens unit includes two or more lens layers and performs both a source lens function and a focusing function. Furthermore, the electron column is characterized in that the lens unit includes one or more deflector-type lens layers and additionally performs a deflector function.

摘要翻译： 本发明涉及包括电子发射源和透镜的电子柱，更具体地说，涉及具有能够促进电子发射源和透镜的对准和组装的结构的电子柱。 具有根据本发明的电子发射源和透镜单元的电子柱的特征在于，透镜单元包括两个或更多个透镜层，并且执行源透镜功能和聚焦功能。 此外，电子柱的特征在于，透镜单元包括一个或多个偏转器型透镜层，并且另外执行偏转器功能。