发明申请
- 专利标题: INSPECTION APPARATUS AND METHOD
- 专利标题(中): 检查装置和方法
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申请号: US12171642申请日: 2008-07-11
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公开(公告)号: US20090015823A1公开(公告)日: 2009-01-15
- 发明人: Hiroshi Yoshikawa , Kenji Saitoh
- 申请人: Hiroshi Yoshikawa , Kenji Saitoh
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-182954 20070712
- 主分类号: G01N21/00
- IPC分类号: G01N21/00
摘要:
An inspection apparatus includes a captured image acquiring unit configured to acquire a captured image that is acquired by shooting an inspection target, an acquiring unit configured to acquire from the captured image a first image region and a second image region whose intensity distributions of reflected light with respect to an incident angle of illumination light emitted to the inspection target are different, and an image processing unit configured to perform image processing for performing different surface inspections on the first image region and the second image region respectively.
公开/授权文献
- US07924418B2 Inspection apparatus and method 公开/授权日:2011-04-12
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