发明申请
US20090015823A1 INSPECTION APPARATUS AND METHOD 有权
检查装置和方法

INSPECTION APPARATUS AND METHOD
摘要:
An inspection apparatus includes a captured image acquiring unit configured to acquire a captured image that is acquired by shooting an inspection target, an acquiring unit configured to acquire from the captured image a first image region and a second image region whose intensity distributions of reflected light with respect to an incident angle of illumination light emitted to the inspection target are different, and an image processing unit configured to perform image processing for performing different surface inspections on the first image region and the second image region respectively.
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