Invention Application
US20090015903A1 Complex Microdevices and Apparatus and Methods for Fabricating Such Devices
审中-公开
用于制造这种装置的复杂微型装置和装置及方法
- Patent Title: Complex Microdevices and Apparatus and Methods for Fabricating Such Devices
- Patent Title (中): 用于制造这种装置的复杂微型装置和装置及方法
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Application No.: US12099976Application Date: 2008-04-09
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Publication No.: US20090015903A1Publication Date: 2009-01-15
- Inventor: Christopher A. Bang , Adam L. Cohen , Michael S. Lockard , John D. Evans
- Applicant: Christopher A. Bang , Adam L. Cohen , Michael S. Lockard , John D. Evans
- Assignee: Microfabrica Inc.
- Current Assignee: Microfabrica Inc.
- Main IPC: G02B26/00
- IPC: G02B26/00 ; C25D5/02
Abstract:
Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB®).
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