发明申请
US20090016862A1 METHOD AND APPARATUS FOR PROVIDING FLAT PANEL DISPLAY ENVIRONMENTAL ISOLATION
审中-公开
用于提供平板显示器的方法和装置环境隔离
- 专利标题: METHOD AND APPARATUS FOR PROVIDING FLAT PANEL DISPLAY ENVIRONMENTAL ISOLATION
- 专利标题(中): 用于提供平板显示器的方法和装置环境隔离
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申请号: US12172084申请日: 2008-07-11
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公开(公告)号: US20090016862A1公开(公告)日: 2009-01-15
- 发明人: Richard H. Gould , Anthony C. Bonora , Michael Krolak
- 申请人: Richard H. Gould , Anthony C. Bonora , Michael Krolak
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
A container for supporting substrates for processing is provided. The container includes a base, a top, and side panels connecting the base and the top. A support structure is disposed in the container. The support structure is configured to support the substrates within the container. The support structure has rows of multiple tensile members extending across a width of the container. Each row of the multiple tensile members is configured to support a substrate, wherein one of the side panels includes a moveable flexible membrane enabling access into the container. A support structure for the flexible membrane includes a synchronization mechanism for synchronizing movement of the flexible membrane with a door of a receiving module of a processing tool or a door of the processing tool.
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