Invention Application
- Patent Title: Methods Of Forming Openings
- Patent Title (中): 形成开口的方法
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Application No.: US11777055Application Date: 2007-07-12
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Publication No.: US20090017575A1Publication Date: 2009-01-15
- Inventor: Daniel Knudsen , James Chapman
- Applicant: Daniel Knudsen , James Chapman
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L21/4763

Abstract:
Some embodiments include methods of forming openings in which a metal-containing structure is formed over a region of a semiconductor substrate. A patterned metal-containing material is formed over the metal-containing structure, with the metal-containing material having a gap extending therethrough. An entirety of the metal-containing structure is removed through the gap to leave an opening over the region of the semiconductor substrate. The region of the semiconductor substrate may comprise CMOS sensors, and one or both of filter material and microlens material may be formed within the opening.
Public/Granted literature
- US07829369B2 Methods of forming openings Public/Granted day:2010-11-09
Information query
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