发明申请
- 专利标题: AGING DEVICE
- 专利标题(中): 老化设备
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申请号: US12173535申请日: 2008-07-15
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公开(公告)号: US20090020803A1公开(公告)日: 2009-01-22
- 发明人: Hiroshi Watanabe , Atsuhiro Kinoshita , Shigeki Kobayashi , Daisuke Hagishima
- 申请人: Hiroshi Watanabe , Atsuhiro Kinoshita , Shigeki Kobayashi , Daisuke Hagishima
- 优先权: JP2007-186343 20070717
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
An aging device according to an embodiment of the present invention includes a semiconductor substrate, first and second diffusion layers provided in a first element region, a floating gate provided above a channel region between the first and second diffusion layers, and a control gate electrode provided beside the floating gate with an interval in the lateral direction. A coupling capacitance between the floating gate and the control gate electrode is larger than a coupling capacitance between the floating gate and the semiconductor substrate.
公开/授权文献
- US07977729B2 Aging device 公开/授权日:2011-07-12
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