发明申请
- 专利标题: POSITIVE RESIST COMPOSITION AND PATTERN FORMING METHOD
- 专利标题(中): 积极抵抗组成和图案形成方法
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申请号: US12176589申请日: 2008-07-21
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公开(公告)号: US20090023096A1公开(公告)日: 2009-01-22
- 发明人: Shinji TARUTANI , Kenji WADA , Hideaki TSUBAKI
- 申请人: Shinji TARUTANI , Kenji WADA , Hideaki TSUBAKI
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM CORPORATION
- 当前专利权人: FUJIFILM CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-189977 20070720
- 主分类号: G03F7/004
- IPC分类号: G03F7/004
摘要:
A positive resist composition, includes: (A) a compound capable of generating an acid upon irradiation with actinic rays or radiation; (B) a resin of which solubility in an alkali developer increases under an action of an acid, the resin containing 80 mol % or more of an aromatic group-free copolymerization component; and (C) a compound capable of decomposing under an action of an acid to generate an acid, wherein an absolute value of difference in pKa between the acid generated from the component (A) and the acid generated from the component (C) is 2 or less, and an absolute value of difference in molecular weight between the acid generated from the component (A) and the acid generated from the component (C) is 50 or less.
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