发明申请
- 专利标题: COMPACT NANOFABRICATION APPARATUS
- 专利标题(中): 紧凑的纳米装置
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申请号: US12116908申请日: 2008-05-07
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公开(公告)号: US20090023607A1公开(公告)日: 2009-01-22
- 发明人: Sergey V. Rozhok , Michael Nelson , Nabil A. Amro , Joseph S. Fragala , Raymond Roger Shile , John Edward Bussan , Dirk N. vanMerkestyn
- 申请人: Sergey V. Rozhok , Michael Nelson , Nabil A. Amro , Joseph S. Fragala , Raymond Roger Shile , John Edward Bussan , Dirk N. vanMerkestyn
- 专利权人: Nanolnk, Inc.
- 当前专利权人: Nanolnk, Inc.
- 主分类号: C40B50/14
- IPC分类号: C40B50/14 ; C40B60/14
摘要:
An apparatus for use in fabricating structures and depositing materials from tips to surfaces for patterning in direct-write mode, providing ability to travel macroscopic distances and yet provide for nanoscale patterning. Useful in small scale fabrication and nanolithography. The instrument can be compact and used on a laboratory bench or desktop. An apparatus comprising: at least one multi-axis assembly comprising a plurality of nanopositioning stages, at least one pen assembly, wherein the pen assembly and the multi-axis assembly are adapted for delivery of material from the pen assembly to a substrate which is positioned by the multi-axis assembly, at least one viewing assembly, at least one controller. Nanopositioning by piezoelectric methods and devices and motors is particularly useful. The apparatus can include integrated environmental chambers and housings, as well as ink reservoirs for materials to be delivered. The viewing assembly can be a microscope with a long working distance. Particularly useful for fabrication of bioarrays or microarrays. The multi-axis assembly can be a five-axis assembly. Software can facilitate efficient usage.
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